Wafer Cassette Carrier

Details:

Wafer Cassette Carrier are construction with PFA,PEEK,PP,PBT,PEI,PC and more,class 100

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Description

Technical Parameters

Description:

Wafer Cassette Carrier are construction with PFA,PEEK,PP,PEI,PC and more

For general process. Wafer cassette carrier and used to transfer between station and station.

Provide suitable characteristics of the polymer composite material according to customer’s needs.

Wafer cassette carrier can collocation with airtight storage box to protect wafer.
ESD material are provided.
Use to transfer inside factory

Able to go with airtight Storage Box to protect wafer

Wafer cassette carrier feature:

Material	Degree of temperature resistance	Property	Application
PFA Cassette	200~220℃	Strong acid, strong hydrofluoric acid, strong base resistant	For acid& base process
PP Cassette	40~60℃	Pros: Light weight, able to welding Cons: Distort easily	For general transfer process
PEEK Cassette	120℃	High hardness, not easy to distort, high temperature resistant	For general transfer process
PC Cassette	80~100℃	Light weight, able to welding	For general transfer process
PEI Cassette	130~150℃	Wear resistant, anti-static	For general transfer process

Wafer cassette carrier order information

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